Title :
The prediction of stiction failures in MEMS
Author :
Van Spengen, W. Merlijn ; Puers, Robert ; De Wolf, Ingrid
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
The surface interaction energy of sticking surfaces has been the subject of considerable modeling and can be experimentally investigated. Much less is currently known about the influence that a certain surface interaction energy (distribution) has on the reliability of MEMS devices. The only treatises to date are purely "black box" statistical methods. In this paper, we discuss a comprehensive model that describes many stiction failure situations. For the first time, the surface interaction properties are linked directly to a reliability function.
Keywords :
failure analysis; micromechanical devices; reliability; statistical analysis; stiction; MEMS devices; black box statistical methods; device reliability; energy distribution; microsystems; sticking surfaces; stiction failures; surface interaction energy; Accelerometers; Autocorrelation; Equations; Materials reliability; Microelectromechanical devices; Micromechanical devices; Radiofrequency microelectromechanical systems; Springs; Statistical analysis; Surface treatment;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2003.820295
