Title :
Thermal distribution during destructive pulses in ESD protection devices using a single-shot two-dimensional interferometric method
Author :
Pogany, Dionyz ; Bychikhin, Sergey ; Kuzmik, Jan ; Dubec, Viktor ; Jensen, Nils ; Denison, Marie ; Groos, Gerhard ; Stecher, Matthias ; Gornik, Erich
Author_Institution :
Inst. for Solid State Electron., Vienna Univ. of Technol., Austria
Abstract :
Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a two-dimensional holographic interferometry technique. The hot spot dynamics and the position of destructive current filaments is correlated with the thermal distribution under the nondestructive conditions and with the failure analysis results.
Keywords :
electrostatic devices; electrostatic discharge; failure analysis; holographic interferometry; power semiconductor devices; semiconductor device testing; temperature distribution; thermal diffusion; destruction mechanisms; destructive current filaments; destructive pulses; device failure; failure analysis; hot spot dynamics; photothermal effects; semiconductor device testing; single destructive electrostatic discharge; single-shot two-dimensional interferometric method; smart power ESD protection devices; thermal distribution; thermooptic effects; two-dimensional holographic interferometry; Electrostatic discharge; Electrostatic interference; Failure analysis; Holography; Interferometry; Laser beams; Optical pulses; Probes; Protection; Thermal conductivity;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2003.818382
