Title :
Three-Dimensional Profiling with the Sandia Nuclear Microprobe
Author :
Doyle, B.L. ; Wing, N.D.
Author_Institution :
Sandia National Laboratories Albuquerque, New Mexico 87185
fDate :
4/1/1983 12:00:00 AM
Abstract :
A nuclear microprobe analysis system attached to Sandia´s EN tandem Van de Graaff accelerator is described. A magnetic quadrupole doublet lens is used for the final focus and 2 ¿m beam diameters have been obtained. Several illustrative applications of the microprobe, including the first three-dimensional concentration profiles using Rutherford backscattering and elastic recoil detection ever measured, are given.
Keywords :
Composite materials; Electrons; Ion accelerators; Ion beams; Ionization; Laboratories; Lenses; Magnetic field measurement; Physics; Probes;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1983.4332492
