Title :
A surface-mountable membrane supported filter
Author :
Chatras, M. ; Blondy, P. ; Cros, D. ; Vendier, O. ; Cazaux, J.L.
Author_Institution :
Inst. de Recherche en Commun. Opt. et Microondes, Limoges, France
Abstract :
A silicon micro-machined filter with a simple planar integration on an other substrate is proposed in this article. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and inter-connection are included in the design. Experimental results are presented on a two pole 30 GHz, 4% fractional bandwidth filter with a quality factor of 602 and insertion loss of 1.8 dB. Such a filter can be easily integrated in any circuit using flip-chip technology.
Keywords :
Chebyshev filters; Q-factor; band-pass filters; coplanar waveguide components; elemental semiconductors; membranes; micromachining; micromechanical devices; microwave filters; silicon; surface mount technology; waveguide filters; 30 GHz; CPW line; Chebyshev band-pass filter; flip-chip technology; fractional bandwidth filter; insertion loss; interconnection; packaging; quality factor; shielding substrate; silicon micromachined filter; simple planar integration; surface-mountable membrane supported filter; vertical transition; Band pass filters; Biomembranes; Dielectric losses; Dielectric substrates; Frequency; Millimeter wave circuits; Millimeter wave communication; Millimeter wave technology; Q factor; Silicon;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2003.818528
