Title :
Nickel electroplated widely tunable micromachined capacitor
Author :
Gallant, A.J. ; Wood, D.
Author_Institution :
Sch. of Eng., Durham Univ., UK
fDate :
10/24/2002 12:00:00 AM
Abstract :
Nickel electroplating is used to fabricate a widely tunable micromachined capacitor. From an initial capacitance of 0.7 pF, the device has a tuning ratio of 5.1:1 including parasitics: this is better than twice any previously reported figure for such devices. A process flow is presented which includes electrode surface roughening for stiction avoidance.
Keywords :
capacitance; capacitors; electroplated coatings; nickel; tuning; 0.7 pF; Ni; Ni electroplating; capacitance; electrode surface roughening; process flow; stiction avoidance; tuning ratio; widely tunable micromachined capacitor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020910
