DocumentCode
86547
Title
Thin Metal Film Ni2Si/4H—SiC Vertical Schottky Photodiodes
Author
Sciuto, Antonella ; Mazzillo, Massimo ; Badala, Paolo ; Scuderi, M. ; Carbone, Beatrice ; Coffa, Salvatore
Author_Institution
Inst. for Microelectron. & Microsyst., Catania, Italy
Volume
26
Issue
17
fYear
2014
fDate
Sept.1, 1 2014
Firstpage
1782
Lastpage
1785
Abstract
Photodetection in the ultraviolet (UV) region has drawn extensive attention owing to its various applications in industrial, environmental, and even biological fields. In this letter, we report on the morphological and electro-optical characteristics of continuous thin metal film Ni2Si/4H-SiC photodiodes properly designed for the realization of an extremely compact digital sensor suited to measure the total sun UV radiation for environmental UV light monitoring.
Keywords
Schottky barriers; electro-optical devices; hydrogen; nickel compounds; optical design techniques; optical sensors; photodiodes; silicon compounds; thin film devices; ultraviolet detectors; Ni2Si-H-SiC; biological field applications; continuous thin metal film photodiode design; electro-optical characteristics; environmental UV light monitoring; extremely compact digital sensor; industrial field applications; morphological characteristics; photodetection; total sun UV radiation measurement; ultraviolet region; vertical Schottky photodiodes; Detectors; Films; Metals; Photodiodes; Schottky barriers; Temperature distribution; Temperature measurement; 4H-SiC; Schottky photodiodes; UV Detectors; metal silicide Schottky contact;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2014.2336256
Filename
6851144
Link To Document