Title :
Thin Metal Film Ni2Si/4H—SiC Vertical Schottky Photodiodes
Author :
Sciuto, Antonella ; Mazzillo, Massimo ; Badala, Paolo ; Scuderi, M. ; Carbone, Beatrice ; Coffa, Salvatore
Author_Institution :
Inst. for Microelectron. & Microsyst., Catania, Italy
Abstract :
Photodetection in the ultraviolet (UV) region has drawn extensive attention owing to its various applications in industrial, environmental, and even biological fields. In this letter, we report on the morphological and electro-optical characteristics of continuous thin metal film Ni2Si/4H-SiC photodiodes properly designed for the realization of an extremely compact digital sensor suited to measure the total sun UV radiation for environmental UV light monitoring.
Keywords :
Schottky barriers; electro-optical devices; hydrogen; nickel compounds; optical design techniques; optical sensors; photodiodes; silicon compounds; thin film devices; ultraviolet detectors; Ni2Si-H-SiC; biological field applications; continuous thin metal film photodiode design; electro-optical characteristics; environmental UV light monitoring; extremely compact digital sensor; industrial field applications; morphological characteristics; photodetection; total sun UV radiation measurement; ultraviolet region; vertical Schottky photodiodes; Detectors; Films; Metals; Photodiodes; Schottky barriers; Temperature distribution; Temperature measurement; 4H-SiC; Schottky photodiodes; UV Detectors; metal silicide Schottky contact;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2014.2336256
