DocumentCode :
865647
Title :
Fabrication of ultrathin pinhole-free insulation of aluminium oxide
Author :
Schilling, R.B.
Volume :
52
Issue :
11
fYear :
1964
Firstpage :
1350
Lastpage :
1351
Keywords :
Aluminum oxide; Atmosphere; Fabrication; Gases; Insulation; Integrated circuit yield; Needles; Ovens; Substrates; Valves;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1964.3370
Filename :
1445300
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=865647
