Three fluid transport models by particle-in-cell method for RF glow discharges

Three self-consistent fluid transport models, simulated by the particle-in-cell simulation method (PIC/FE), have been developed for parallel-plate RF glow discharges. The electron transport is modeled by the equilibrium single-moment and nonequilibrium two- and three-moment fluid equations. In the equilibrium single-moment model, the α and γ discharges are underestimated and the nonlocal γ-discharge behavior is difficult to measure. On the other hand, the nonequilibrium three-moment model can clearly demonstrate the distinct α- and γ-discharge effects similar to self-consistent Monte Carlo model results. Moreover, the three-moment model can describe the transition of plasma density, sheath width, and bulk mean energy from the α regime to the γ regime and verify the transition boundary between α and γ regimes which are all consistent with experimental results. The results of the three-fluid models are presented, analyzed, and compared with each other in terms of the plasma density, electric field, average velocity, current density, mean energy, and ionization rate