DocumentCode
865751
Title
Carbon cathode spot plasma flux distributions in low pressures of hydrogen: some evidence for the C++H2→CH++H reaction
Author
Meunier, Jean-Luc ; De Azevedo, Mario Douyon
Author_Institution
Dept. of Chem. Eng., McGill Univ., Montreal, Que., Canada
Volume
20
Issue
6
fYear
1992
fDate
12/1/1992 12:00:00 AM
Firstpage
1053
Lastpage
1059
Abstract
Measurements of the wall current collected from the expanding cathodic arc plasma are reported as a function of angle to cathode plane normal, with hydrogen gas pressure in the arc chamber varying between 10 -4 torr and 10 torr and distance R to the cathode varying between 10 and 80 mm. The angular distribution of the collected current is not seen to be affected by the gas pressure in the chamber. This flux decreases with distance to the cathode as R -(1.4) in vacuum and R -4 in the 1-10 torr pressure domain. Flux intensity evaluated as a function of NR , where N is the number density of hydrogen in the chamber, leads to an evaluation of an effective collision cross section, σe, of 0.2×10-16 cm2 for the C+-ion/H2 molecule interaction. This value can be attributed to the reaction C++H2→CH+ +H and agrees with a velocity of the C+ ions following a shock wave interaction model
Keywords
arcs (electric); carbon; cathodes; chemical exchanges; hydrogen neutral molecules; ion-molecule reactions; plasma collision processes; plasma diagnostics; plasma probes; plasma transport processes; positive ions; 10E-4 to 10 torr; C+; C++H2; C+-H2; H2; angular distribution; cathode spot plasma flux distributions; effective collision cross section; expanding cathodic arc plasma; flux intensity; gas pressure; low pressure discharges; shock wave interaction model; wall current; Cathodes; Copper; Electrodes; Hydrogen; Ion beams; Plasma density; Plasma materials processing; Plasma properties; Plasma waves; Shock waves;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.199572
Filename
199572
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