DocumentCode :
866195
Title :
Semiconductor-network technology—1964
Author :
Lathrop, J.W.
Author_Institution :
Texas Instruments Incorporated, Dallas, Tex.
Volume :
52
Issue :
12
fYear :
1964
Firstpage :
1430
Lastpage :
1444
Abstract :
Technology peculiar to the fabrication of monolithic, semiconductor-network, integrated circuits is discussed. In particular, the status of diffusion, epitaxy, photo processing, thin films, and thick films are discussed. The problem of component isolation is considered separately as a particular application of these technologies. The discussion is primarily qualitative and is designed to acquaint the device and circuit design engineer with the technology of semiconductor networks.
Keywords :
Circuit synthesis; Design engineering; Epitaxial growth; Fabrication; Integrated circuit technology; Isolation technology; Monolithic integrated circuits; Semiconductor thin films; Thick films; Thin film circuits;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1964.3426
Filename :
1445356
Link To Document :
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