Title :
The surface and Microminiaturization
Author_Institution :
University of Illinois, Urbana, Ill.
Abstract :
The reduction in size of miniature devices which depend, for their operation, upon the volume properties of the material is severely limited by the increase in the surface to volume ratio. After a certain critical size is reached, the surface properties of the material may begin to play a dominant role. Various effects which may occur are discussed and a number of examples are cited. It is suggested that miniaturization may proceed more quickly by utilizing the properties of surfaces in design considerations rather than trying to avoid them.
Keywords :
Chemicals; Conductivity; Crystalline materials; Crystals; Insulation; Metal-insulator structures; Semiconductor thin films; Solids; Surface cleaning; Transistors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1964.3427
