DocumentCode

866567

Title

Factors Influencing the Design of Implanters for Metal Applications

Author

Rose, Peter H.

Author_Institution

Zymet Inc., Danvers, Massachusetts, U.S.A.

Volume

30

Issue

2

fYear

1983

fDate

4/1/1983 12:00:00 AM

Firstpage

1697

Lastpage

1700

Keywords

Ceramics; Costs; Inorganic materials; Ion accelerators; Ion beams; Semiconductor device doping; Semiconductor devices; Semiconductor materials; Silicon; Throughput;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/TNS.1983.4332618

Filename

4332618