DocumentCode
866584
Title
Progress in Ion Beam Mixing
Author
Matteson, S.
Author_Institution
Central Research Laboratories Texas Instruments Incorporated P.O. Box 225936, MS 147 Dallas, TX 75265
Volume
30
Issue
2
fYear
1983
fDate
4/1/1983 12:00:00 AM
Firstpage
1705
Lastpage
1708
Abstract
Ion Beam Mixing is a rapidly progressing scientific field wedding material science and ion physics. Technological applications are presently under exploration even though the phenomenological processes are not fully understood. The present work examines the experimental data which provide an understanding of the underlying processes occuring during ion beam mixing. Experimental results of ion beam mixing of thin evaporated Sn layers in mixed Ge/Si solid solutions are reported. Tentative conclusions are drawn as to the likely directions for fruitful avenues of investigation.
Keywords
Instruments; Ion beams; Laboratories; Materials science and technology; Neutrons; Nonhomogeneous media; Physics; Solids; Temperature; Tin;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1983.4332620
Filename
4332620
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