DocumentCode :
866584
Title :
Progress in Ion Beam Mixing
Author :
Matteson, S.
Author_Institution :
Central Research Laboratories Texas Instruments Incorporated P.O. Box 225936, MS 147 Dallas, TX 75265
Volume :
30
Issue :
2
fYear :
1983
fDate :
4/1/1983 12:00:00 AM
Firstpage :
1705
Lastpage :
1708
Abstract :
Ion Beam Mixing is a rapidly progressing scientific field wedding material science and ion physics. Technological applications are presently under exploration even though the phenomenological processes are not fully understood. The present work examines the experimental data which provide an understanding of the underlying processes occuring during ion beam mixing. Experimental results of ion beam mixing of thin evaporated Sn layers in mixed Ge/Si solid solutions are reported. Tentative conclusions are drawn as to the likely directions for fruitful avenues of investigation.
Keywords :
Instruments; Ion beams; Laboratories; Materials science and technology; Neutrons; Nonhomogeneous media; Physics; Solids; Temperature; Tin;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1983.4332620
Filename :
4332620
Link To Document :
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