• DocumentCode
    867582
  • Title

    Damping of the resonant modes of a rectangular metal package [MMICs]

  • Author

    Williams, Dylan F.

  • Author_Institution
    Ball Aerosp. Syst. Div., Boulder, CO
  • Volume
    37
  • Issue
    1
  • fYear
    1989
  • fDate
    1/1/1989 12:00:00 AM
  • Firstpage
    253
  • Lastpage
    256
  • Abstract
    It is shown that the lowest order TM110 resonant mode of a metal package can be suppressed by fixing a substrate coated with a thin resistive film to the upper wall of the package cavity. Design information is presented to allow unwanted modes to be easily and effectively damped with this technique. It was found that it is possible to obtain resonant mode quality factors of 20 or less with film resistivities between 10 and 30 Ω/sq on high-dielectric-constant substrates. Thin films of this resistivity can be formed on alumina, which has a high dielectric constant, by evaporating approximately 100-1000 Å of chrome or titanium on its surface. The backside of the alumina substrate can then be metallized and soldered to the lid of a package containing a large monolithic microwave integrated circuit, using the same proven technology used to affix the circuit to the bottom of the package, effectively damping the lowest order cavity mode supported by the package
  • Keywords
    MMIC; boundary-value problems; cavity resonators; integrated circuit technology; packaging; resonance; BVP; Cr-Al2O3; MMIC; TM110 resonant mode; Ti-Al2O3; alumina substrate; coated substrate; design aspects; high-dielectric-constant substrates; lowest order cavity mode; monolithic microwave integrated circuit; rectangular metal package; resonant modes; thin resistive film; unwanted modes damping; Conductivity; Damping; Dielectric substrates; Dielectric thin films; High-K gate dielectrics; Integrated circuit metallization; Integrated circuit packaging; Q factor; Resonance; Titanium;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/22.20046
  • Filename
    20046