DocumentCode
867582
Title
Damping of the resonant modes of a rectangular metal package [MMICs]
Author
Williams, Dylan F.
Author_Institution
Ball Aerosp. Syst. Div., Boulder, CO
Volume
37
Issue
1
fYear
1989
fDate
1/1/1989 12:00:00 AM
Firstpage
253
Lastpage
256
Abstract
It is shown that the lowest order TM110 resonant mode of a metal package can be suppressed by fixing a substrate coated with a thin resistive film to the upper wall of the package cavity. Design information is presented to allow unwanted modes to be easily and effectively damped with this technique. It was found that it is possible to obtain resonant mode quality factors of 20 or less with film resistivities between 10 and 30 Ω/sq on high-dielectric-constant substrates. Thin films of this resistivity can be formed on alumina, which has a high dielectric constant, by evaporating approximately 100-1000 Å of chrome or titanium on its surface. The backside of the alumina substrate can then be metallized and soldered to the lid of a package containing a large monolithic microwave integrated circuit, using the same proven technology used to affix the circuit to the bottom of the package, effectively damping the lowest order cavity mode supported by the package
Keywords
MMIC; boundary-value problems; cavity resonators; integrated circuit technology; packaging; resonance; BVP; Cr-Al2O3; MMIC; TM110 resonant mode; Ti-Al2O3; alumina substrate; coated substrate; design aspects; high-dielectric-constant substrates; lowest order cavity mode; monolithic microwave integrated circuit; rectangular metal package; resonant modes; thin resistive film; unwanted modes damping; Conductivity; Damping; Dielectric substrates; Dielectric thin films; High-K gate dielectrics; Integrated circuit metallization; Integrated circuit packaging; Q factor; Resonance; Titanium;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/22.20046
Filename
20046
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