Title :
Continuous Time-of-Flight Ranging Using a MEMS Diffractive Subwavelength Period Grating (de)Modulator
Author :
Roels, Joris ; Van der Tempel, Ward ; Van Nieuwenhove, Daniël ; Grootjans, Riemer ; Kuijk, Maarten ; Van Thourhout, Dries ; Baets, Roel G.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.-IMEC, Ghent
Abstract :
We present a time-of-flight (TOF) ranging experiment based on optical mixing. The key component in this experiment is the optical (de)modulator. consequently we also report on the design, fabrication, and characterization of a microelectromechanical system diffractive grating (de)modulator with a subwavelength period. The obtained results are an important step toward an optical mixing based TOF 3-D imaging system, which we will further develop in our future work.
Keywords :
demodulators; diffraction gratings; electro-optical modulation; image sensors; laser ranging; micro-optomechanical devices; optical design techniques; optical fabrication; MEMS optical demodulator; TOF 3-D imaging sensor system; continuous time-of-flight ranging; diffractive subwavelength period grating; microelectromechanical system; optical design; optical fabrication; optical mixing; subwavelength period; 3-D imaging; Microelectromechanical devices; optical modulation; time-of-flight (TOF);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2008.2004348
