DocumentCode
869016
Title
Magnetics and microstructure of sputtered Ni80Fe20 /SiO2 multilayer films
Author
Russak, Michael A. ; Jahnes, Christopher V. ; Re, Mark E. ; Webb, Rucknell C. ; Mirzamaani, S. Mohamaad
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Volume
26
Issue
5
fYear
1990
fDate
9/1/1990 12:00:00 AM
Firstpage
2332
Lastpage
2334
Abstract
Multilayered Ni80Fe20/SiO2 films have been produced by sputter deposition. The effects of lamination on the bulk magnetic properties, microstructure, and high-frequency permeability of stacks with various Ni80Fe20 and SiO2 thicknesses were investigated. In general, laminated films with a total magnetic thickness of 1.5 μm had significantly lower H c and extended frequency response, compared to unlaminated films of the same magnetic thickness. In addition, the impact of lamination on domain configuration of yoke-shaped structures was determined, and excellent agreement with micromagnetic theoretical prediction was obtained
Keywords
ferromagnetic properties of substances; iron alloys; magnetic permeability; magnetic thin films; nickel alloys; silicon compounds; sputtered coatings; superlattices; Ni80Fe20-SiO2; bulk magnetic properties; frequency response; high-frequency permeability; magnetic thickness; micromagnetic theoretical prediction; microstructure; sputter deposition; yoke-shaped structures; Couplings; Grain size; Iron; Laminates; Magnetic films; Magnetic multilayers; Magnetostatics; Microstructure; Sputtering; Substrates;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.104922
Filename
104922
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