DocumentCode
869994
Title
Laser processing of high-T c superconducting thin films
Author
Venkatesan, T. ; Wu, Xindi ; Inam, Arun ; Chang, Chuan C. ; Hegde, Manjanain S. ; Dutta, Barundeb
Author_Institution
Bellcore, Red Bank, NJ, USA
Volume
25
Issue
11
fYear
1989
fDate
11/1/1989 12:00:00 AM
Firstpage
2388
Lastpage
2393
Abstract
High-T c superconducting thin films can be deposited and processed by pulsed and CW lasers, and a respectable materials technology for the Y-Ba-Cu-O superconductor is rapidly emerging. The pulsed laser deposition technique is simple because it produces films with compositions nearly identical to those of the target pellets. A larger variety of substrates can be used, compared to other deposition technologies, because of the relatively low temperature requirements. The laser deposition mechanism has been investigated. As-deposited superconducting films, epitaxial films with smooth surfaces, and multilayer structures with abrupt interfaces have been produced. The electrical transport properties can be changed locally using a focused argon-ion laser by modifying the oxygen stoichiometry. This laser writing can be erased by room-temperature exposure to an oxygen plasma. Other laser patterning methods such as material removal, melt-quench, and direct pattern transfer are being developed
Keywords
barium compounds; high-temperature superconductors; laser beam applications; superconducting epitaxial layers; superconducting thin films; vacuum deposition; yttrium compounds; Ar laser; CW lasers; Y-Ba-Cu-O superconductor; abrupt interfaces; direct pattern transfer; electrical transport; epitaxial films; high temperature superconductors; high-Tc superconducting thin films; laser writing; material removal; melt-quench; multilayer structures; patterning methods; plasma; pulsed laser deposition; room-temperature exposure; smooth surfaces; stoichiometry; substrates; Materials science and technology; Optical pulses; Plasma temperature; Pulsed laser deposition; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting materials; Superconducting thin films; Yttrium barium copper oxide;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/3.42070
Filename
42070
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