Remote RF powering system for wireless MEMS strain sensors

Author

Chaimanonart, Nattapon ; Young, Darrin J.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA

Volume

6

Issue

2

fYear

2006

fDate

4/1/2006 12:00:00 AM

Firstpage

484

Lastpage

489

Abstract

A reliable remote radio frequency (RF) powering system is developed for industrial wireless microelectromechanical systems (MEMS) strain-sensing applications. The prototype system is insensitive to mechanical rotation and produces a stable DC voltage of 2.8 V with a 2-mA current supply capability from a 50-MHz RF power source with a power conversion efficiency of 11%. An improved efficiency can be expected with an optimized power transmitter design. The CMOS power converter electronics are fabricated in a 1.5-μm CMOS process occupying an area of approximately 1 ×1 mm. The achieved DC power is adequate for supplying a high-performance wireless MEMS strain-sensing system.

Keywords

microsensors; remote sensing; strain sensors; wireless sensor networks; 1.5 micron; 11 percent; 2 mA; 2.8 V; 50 MHz; MEMS microsystems; radio frequency powering system; remote RF powering system; telemetry; wireless MEMS strain sensors; CMOS process; Capacitive sensors; Electricity supply industry; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Power system reliability; Radio frequency; Sensor systems; Wireless sensor networks; Inductive coupling; microelectromechanical systems (MEMS) microsystems; radio frequency (RF) powering system; strain sensors; telemetry;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.870158

Filename

1608093