Damage Ranges for Implanted Hydrogen Isotopes in Gallium Arsenide

Gallium Arsenide has been bombarded with protons and deuterons at a range of energies up to 1MeV. The depth of maximum damage was measured by a cleave and etch method, and was compared with calculated ranges. While proton damage ranges are well in accord with theory and previous reports, deuteron penetration was greater than expected, and not greatly less than for protons. Some results for tritons are also presented.