DocumentCode
871808
Title
High-performance submicrometer AlInAs-GaInAs HEMT´s
Author
Mishra, Umesh K. ; Brown, A.S. ; Jelloian, L.M. ; Hackett, L.H. ; Delaney, M.J.
Author_Institution
Hughes Res. Lab., Malibu, CA, USA
Volume
9
Issue
1
fYear
1988
Firstpage
41
Lastpage
43
Abstract
The performance of long (1.3- mu m) and short (0.3- mu m) gate-length Al/sub 0.48/In/sub 0.52/ As-Ga/sub 0.47/In/sub 0.53/ high-electron-mobility transistors (HEMTs) is reported. Transconductances of 465 and 650 mS/mm, respectively, were achieved. The 0.3- mu m-long gate-length device exhibited an f/sub t/>80 GHz. These results are attributed to the excellent electronic properties of the AlInAs-GaInAs modulation-doped system.<>
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; high electron mobility transistors; indium compounds; 0.3 micron; 1.3 micron; 465 mS; 650 mS; AlInAs-GaInAs; HEMTs; electronic properties; gate-length; high-electron-mobility transistors; modulation-doped system; transconductance; Electron mobility; Fabrication; HEMTs; Indium phosphide; Lithography; MODFETs; Molecular beam epitaxial growth; Photoluminescence; Sheet materials; Temperature measurement;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.20407
Filename
20407
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