• DocumentCode
    871959
  • Title

    Excimer laser patterning of high-Tc superconducting thin films of YBCO

  • Author

    Savva, N. ; Williams, K.F. ; Davis, G.M. ; Gower, M.C.

  • Author_Institution
    Rutherford Appleton Lab., Didcot, UK
  • Volume
    25
  • Issue
    11
  • fYear
    1989
  • fDate
    11/1/1989 12:00:00 AM
  • Firstpage
    2399
  • Lastpage
    2404
  • Abstract
    The patterning by excimer laser ablative etching of thin superconducting films of YBCO on MgO and fused silica substrates which were fabricated by laser sputtering is discussed. The etch rate as a function of laser fluence, wavelength, and number of pulses has been investigated. Although etched film surfaces were found to be considerably smoother than annealed films, the laser etching itself was found not to be a totally thermal process
  • Keywords
    boron compounds; high-temperature superconductors; laser beam effects; sputter etching; superconducting thin films; yttrium compounds; MgO; SiO2; Y-Ba-Cu-O; annealed films; etch rate; excimer laser ablative etching; fused silica; high temperature superconductors; high-Tc superconducting thin films; laser fluence; laser patterning; laser sputtering; Gas lasers; Glass; Lattices; Lenses; Optical films; Optical materials; Pulsed laser deposition; Substrates; Superconducting thin films; Yttrium barium copper oxide;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/3.42072
  • Filename
    42072
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=871959