Title :
Excimer laser patterning of high-Tc superconducting thin films of YBCO
Author :
Savva, N. ; Williams, K.F. ; Davis, G.M. ; Gower, M.C.
Author_Institution :
Rutherford Appleton Lab., Didcot, UK
fDate :
11/1/1989 12:00:00 AM
Abstract :
The patterning by excimer laser ablative etching of thin superconducting films of YBCO on MgO and fused silica substrates which were fabricated by laser sputtering is discussed. The etch rate as a function of laser fluence, wavelength, and number of pulses has been investigated. Although etched film surfaces were found to be considerably smoother than annealed films, the laser etching itself was found not to be a totally thermal process
Keywords :
boron compounds; high-temperature superconductors; laser beam effects; sputter etching; superconducting thin films; yttrium compounds; MgO; SiO2; Y-Ba-Cu-O; annealed films; etch rate; excimer laser ablative etching; fused silica; high temperature superconductors; high-Tc superconducting thin films; laser fluence; laser patterning; laser sputtering; Gas lasers; Glass; Lattices; Lenses; Optical films; Optical materials; Pulsed laser deposition; Substrates; Superconducting thin films; Yttrium barium copper oxide;
Journal_Title :
Quantum Electronics, IEEE Journal of
