Title :
Microwave bulk-acoustic-wave reflection-grating resonators
Author :
Oates, D.E. ; Pan, J.Y.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
fDate :
5/1/1988 12:00:00 AM
Abstract :
A technique for fabrication of bulk-acoustic-wave (BAW) resonators operating at fundamental frequencies between 1 and 10 GHz is presented. The resonators utilize a reflection grating made by optical holographic methods in iron-doped lithium niobate. Q factors of 30000 at 1 GHz have been demonstrated. Extension to Q of 10000 at 10 GHz appears feasible. Projected limitations to performance are discussed. The high Q at the high fundamental frequency directly results in low-phase noise. Phase-noise measurements of BAW resonator-stabilized oscillators operating at 1.14 GHz are presented. The single-sideband noise floor of <-140 dBc/Hz is shown to be in agreement with an analytical model. Projected improvements in the devices and circuits promise performance of <-160 dBc/Hz.<>
Keywords :
acoustic resonators; microwave oscillators; 1 to 10 GHz; BAW; LiNbO/sub 3/:Fe; bulk-acoustic-wave reflection-grating resonators; fundamental frequency; microwave oscillators; optical holographic methods; Circuit noise; Frequency; Gratings; Holographic optical components; Holography; Lithium niobate; Optical device fabrication; Optical reflection; Optical resonators; Phase measurement;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
