Title :
Experimental study of phase noise in FBAR resonators
Author :
Gribaldo, Sébastien ; Chay, Cyril ; Tournier, Éric ; Llopis, Olivier
Author_Institution :
LAAS-CNRS, Toulouse
fDate :
11/1/2006 12:00:00 AM
Abstract :
Phase noise of micromachined bulk acoustic wave resonators is investigated. A measurement bench, able to characterize the phase noise of a single resonator on-wafer, is set up. The experimental data demonstrate the existence of a 1/f phase noise component, the amplitude of which is strongly dependent on the resonator geometry. Particularly, the apodized resonators have shown the best phase noise performance, with no degradation of the Q factor
Keywords :
1/f noise; acoustic resonators; micromechanical resonators; phase noise; 1/f phase noise; FBAR resonators; Q factor; apodized resonators; micromachined bulk acoustic wave resonators; on-wafer single resonator; resonator geometry; Acoustic waves; Film bulk acoustic resonators; Geometry; Microwave oscillators; Monolithic integrated circuits; Noise measurement; Noise reduction; Phase measurement; Phase noise; Q factor;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.138
