Microreplicated RF toroidal inductor

Author

Ermolov, Vladimir ; Lindström, Tomas ; Nieminen, Heikki ; Olsson, Mikael ; Read, Michael ; Ryhänen, Tapani ; Silanto, Samuli ; Uhrberg, Simon

Author_Institution

Nokia Res. Center, Helsinki, Finland

Volume

52

Issue

1

fYear

2004

Firstpage

29

Lastpage

37

Abstract

This paper reports on the modeling and fabrication of a truly three-dimensional high-quality-factor toroidal inductor using polymer replication processes. The critical dimensions are in the micrometer range, and the applied manufacturing method is based on polymer replication. Electrical measurements show that the inductor with an inductance of 6.0 nH exhibits a peak quality factor of 50 at a frequency of 3 GHz. Model verified by the measurement results shows that further improvement is still possible. Furthermore, the applied manufacturing technique can be extended to become a flexible packaging platform.

Keywords

Q-factor; dielectric losses; electroforming; equivalent circuits; inductance; inductors; micromachining; micromechanical devices; replica techniques; 3 GHz; RF MEMS; dielectric losses; electroforming; equivalent-circuit; fabrication method; flexible packaging; micromachining; micrometer range critical dimensions; microreplicated RF toroidal inductor; modeling method; ohmic losses; parasitic coupling; polymer replication processes; three-dimensional high-quality-factor inductor; Electric variables measurement; Fabrication; Flexible manufacturing systems; Frequency measurement; Inductance measurement; Inductors; Packaging; Polymers; Q factor; Radio frequency;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2003.821236

Filename

1262671