Title :
Embedded Micromirror Inserts for Optical Printed Circuit Boards
Author :
Hendrickx, Nina ; Erps, Jürgen Van ; Bosman, Erwin ; Debaes, Christof ; Thienpont, Hugo ; Daele, Peter Van
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent
Abstract :
We present the use of an embedded 45deg micromirror, which is patterned in polymer photoresist using deep proton writing. The micromirror is metallized and inserted in a laser ablated cavity in the optical layer and in a next step covered with cladding material. Surface roughness measurements confirm the excellent quality of the mirror facet. Loss measurements have been carried out to evaluate the behavior of the embedded micromirror. These measurements indicate an average loss below 0.35 dB, measured in a receiver scheme, which is the most stringent configuration.
Keywords :
integrated optoelectronics; micromirrors; optical interconnections; optical losses; optical waveguides; photoresists; printed circuits; deep proton writing; embedded micromirror inserts; laser ablated cavity; laser ablation; loss measurements; optical printed circuit boards; polymer photoresist; surface roughness measurements; Loss measurement; Metallization; Micromirrors; Optical losses; Optical polymers; Optical receivers; Printed circuits; Protons; Resists; Writing; Coupling structures; deep proton writing (DPW); laser ablation; micromirror; optical interconnections; polymer waveguides;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2008.2004563