DocumentCode
874183
Title
Potential of acoustic imaging in the detection of nanometer gaps
Author
Tohmyoh, Hironori ; Saka, Masumi ; Hirayama, Hayato
Author_Institution
Dept. of Nanomechanics, Tohoku Univ., Sendai
Volume
53
Issue
12
fYear
2006
fDate
12/1/2006 12:00:00 AM
Firstpage
2481
Lastpage
2483
Abstract
The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap
Keywords
acoustic microscopy; nanotechnology; silicon; ultrasonic imaging; ultrasonic materials testing; Si; dry-contact acoustic imaging; lateral imaging resolution; nanometer gap detection; silicon; water-immersion acoustic imaging; Acoustic imaging; Acoustic signal detection; Bonding; Image resolution; Polymers; Resonance; Silicon; Solids; Ultrasonic imaging; Underwater acoustics;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2006.196
Filename
4037284
Link To Document