DocumentCode :
874286
Title :
Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices
Author :
Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
Author_Institution :
aixACCT Syst. GmbH, Aachen
Volume :
54
Issue :
1
fYear :
2007
fDate :
1/1/2007 12:00:00 AM
Firstpage :
8
Lastpage :
14
Abstract :
We present a new measurement method to characterize piezoelectric thin films utilizing a four-point bending setup. In combination with a single- or a double-beam laser interferometer, this setup allows the determination of the effective transverse and longitudinal piezoelectric coefficients e31,f and d33,f respectively. Additionally, the dielectric coefficient and the large signal electrical polarization are measured to add further important characteristics of the film. These data are essential for piezoelectric thin film process specification and the design and qualification of microelectromechanical systems devices.
Keywords :
dielectric polarisation; electric variables measurement; micromechanical devices; piezoelectric thin films; piezoelectricity; MEMS devices; dielectric coefficient; double-beam laser interferometer; electrical characteristics; electrical polarization; electromechanical characteristics; four-point bending; longitudinal piezoelectric coefficients; piezoelectric thin films; single-beam laser interferometer; Dielectric materials; Dielectric measurements; Dielectric thin films; Electric variables measurement; Electrodes; Microelectromechanical devices; Piezoelectric films; Piezoelectric materials; Strain measurement; Substrates; Computer Simulation; Elasticity; Electrochemistry; Equipment Design; Equipment Failure Analysis; Materials Testing; Mechanics; Membranes, Artificial; Models, Chemical; Stress, Mechanical; Transducers; Ultrasonography;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2007.206
Filename :
4037295
Link To Document :
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