• DocumentCode
    874584
  • Title

    Ultra-violet direct patterning of metal on polyimide

  • Author

    Ng, Jack H-G ; Desmulliez, Marc Philippe Y. ; Prior, K.A. ; Hand, Duncan P.

  • Volume
    3
  • Issue
    3
  • fYear
    2008
  • fDate
    9/1/2008 12:00:00 AM
  • Firstpage
    82
  • Lastpage
    89
  • Abstract
    Copper micro-patterns have been fabricated on polyimide substrates by ultra-violet (UV) lithography without the use of evaporation techniques or photoresist materials. Using a photoreactive polymer-reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating, a novel light-directed metal-patterning method in air atmosphere was realised. The interaction of UV light and MPEG in ethanol film enabled the photoreduction of mobile silver ions available within the surface-modified polyimide substrates. The silver nanoparticle patterns thus formed served as active catalytic seed layers for subsequent electroless copper plating. Narrow copper tracks with low resistivity close to that of bulk copper were achieved. MPEG is a non-toxic, low cost and commercially available polymer which can be easily spin-coated and washed off after the patterning process. These attractive properties of MPEG together with its photoreactivity provide great potential for developments of UV direct-metallisation methods.
  • Keywords
    catalysis; copper; electroless deposition; electroplating; integrated circuit metallisation; nanoparticles; nanopatterning; ultraviolet lithography; Cu; active catalytic seed layers; air atmosphere; copper micropatterns; electroless copper plating; ethanol film; light-directed metal-patterning; metal; methoxy poly(ethylene glycol); nanoparticle patterns; photoreactive polymer-reducing agent; photoreduction; polyimide; polyimide substrates; selective metallisation; surface-modified polyimide substrates; thin film coating; ultraviolet direct patterning; ultraviolet lithography;
  • fLanguage
    English
  • Journal_Title
    Micro & Nano Letters, IET
  • Publisher
    iet
  • ISSN
    1750-0443
  • Type

    jour

  • DOI
    10.1049/mnl:20080017
  • Filename
    4634715