DocumentCode
874584
Title
Ultra-violet direct patterning of metal on polyimide
Author
Ng, Jack H-G ; Desmulliez, Marc Philippe Y. ; Prior, K.A. ; Hand, Duncan P.
Volume
3
Issue
3
fYear
2008
fDate
9/1/2008 12:00:00 AM
Firstpage
82
Lastpage
89
Abstract
Copper micro-patterns have been fabricated on polyimide substrates by ultra-violet (UV) lithography without the use of evaporation techniques or photoresist materials. Using a photoreactive polymer-reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating, a novel light-directed metal-patterning method in air atmosphere was realised. The interaction of UV light and MPEG in ethanol film enabled the photoreduction of mobile silver ions available within the surface-modified polyimide substrates. The silver nanoparticle patterns thus formed served as active catalytic seed layers for subsequent electroless copper plating. Narrow copper tracks with low resistivity close to that of bulk copper were achieved. MPEG is a non-toxic, low cost and commercially available polymer which can be easily spin-coated and washed off after the patterning process. These attractive properties of MPEG together with its photoreactivity provide great potential for developments of UV direct-metallisation methods.
Keywords
catalysis; copper; electroless deposition; electroplating; integrated circuit metallisation; nanoparticles; nanopatterning; ultraviolet lithography; Cu; active catalytic seed layers; air atmosphere; copper micropatterns; electroless copper plating; ethanol film; light-directed metal-patterning; metal; methoxy poly(ethylene glycol); nanoparticle patterns; photoreactive polymer-reducing agent; photoreduction; polyimide; polyimide substrates; selective metallisation; surface-modified polyimide substrates; thin film coating; ultraviolet direct patterning; ultraviolet lithography;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl:20080017
Filename
4634715
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