DocumentCode
875117
Title
Unsticking MEMS - [update]
Author
Das, Saswato R.
Volume
45
Issue
10
fYear
2008
Firstpage
18
Lastpage
18
Abstract
Researchers at Los Alamos National Laboratory, in New Mexico, think they may have the answer to a vexing problem called stiction, which causes ultrasmall components of microelectromechanical systems (MEMS) to stick together. This impediment to micromovement is caused by the Casimir effect (after the Dutch theoretical physicist Hendrik Casimir), an odd attractive force that influences only objects that are very close together. As MEMS components are shrunk to a scale of hundreds of nanometers or less, many engineers predict that the Casimir effect will become more of a problem.
Keywords
Laboratories; Micromechanical devices; Robots;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.2008.4635042
Filename
4635042
Link To Document