• DocumentCode
    875117
  • Title

    Unsticking MEMS - [update]

  • Author

    Das, Saswato R.

  • Volume
    45
  • Issue
    10
  • fYear
    2008
  • Firstpage
    18
  • Lastpage
    18
  • Abstract
    Researchers at Los Alamos National Laboratory, in New Mexico, think they may have the answer to a vexing problem called stiction, which causes ultrasmall components of microelectromechanical systems (MEMS) to stick together. This impediment to micromovement is caused by the Casimir effect (after the Dutch theoretical physicist Hendrik Casimir), an odd attractive force that influences only objects that are very close together. As MEMS components are shrunk to a scale of hundreds of nanometers or less, many engineers predict that the Casimir effect will become more of a problem.
  • Keywords
    Laboratories; Micromechanical devices; Robots;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2008.4635042
  • Filename
    4635042