DocumentCode :
875313
Title :
The Ceneration of Field Sensitive Interface States in Commercial CMOS Devices
Author :
Crowley, John L. ; Dries, Lawrence J.
Author_Institution :
Lockheed Palo Alto Research Laboratory Palo Alto, California 94304
Volume :
31
Issue :
6
fYear :
1984
Firstpage :
1267
Lastpage :
1272
Keywords :
CMOS process; Capacitance-voltage characteristics; Energy measurement; Frequency measurement; Interface states; MOS capacitors; Manufacturing processes; Phase change materials; Stress measurement; Voltage;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1984.4333494
Filename :
4333494
Link To Document :
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