Micromechanical gyroscope finite-element analysis

Author

Nesterenko, T.G. ; Plotnikova, I.V. ; Plotnikov, I.A. ; Lysova, O.M. ; Zhaldybin, L.D.

Author_Institution

Tomsk Polytech. Univ., Tomsk

Volume

23

Issue

9

fYear

2008

Firstpage

28

Lastpage

30

Abstract

Mechanical analysis by method of finite-element analysis of the construction of two-component micromechanical gyroscope is explored. 3D geometric model and finite-element model of the gyroscope are made. Natural frequencies and mode shapes of the gyroscope are determined. Parameters ensuring resonance tuning are realized. The choice of the most appropriate variant of construction takes place by realizing of modal analysis and varing of sensor´s geometry. Deformations of device construction elements determined at maximum of the measured velocity.

Keywords

deformation; finite element analysis; gyroscopes; microsensors; modal analysis; tuning; vibrations; 3D geometric model; deformations; finite-element analysis; gyroscope mode shapes; mechanical analysis; modal analysis; natural frequencies; resonance tuning; sensor geometry; two-component micromechanical gyroscope; Finite element methods; Frequency; Geometry; Gyroscopes; Micromechanical devices; Modal analysis; Resonance; Shape; Solid modeling; Tuning;

fLanguage

English

Journal_Title

Aerospace and Electronic Systems Magazine, IEEE

Publisher

ieee

ISSN

0885-8985

Type

jour

DOI

10.1109/MAES.2008.4635068

Filename

4635068