DocumentCode
875955
Title
Some reliability considerations pertaining to LSI technology
Author
Schlacter, Michael M. ; Keen, Ralph S., Jr. ; Schnable, George L.
Volume
6
Issue
5
fYear
1971
fDate
10/1/1971 12:00:00 AM
Firstpage
327
Lastpage
334
Abstract
This paper discusses the trends that have developed in LSI, and the requirements for refinements in process technology, closer process control, and improvements in design that are considered to be essential for the full realization of high LSI reliability. Particular attention is paid to advanced multilevel-structure processing and to the use of specially designed test vehicles for purposes of process improvement and process control.
Keywords
Large scale integration; Reliability; large scale integration; reliability; Circuit testing; Complexity theory; Cost function; Helium; Large scale integration; Microelectronics; Plastic packaging; Process control; Vehicles; Wire;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/JSSC.1971.1050195
Filename
1050195
Link To Document