Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation

Author

Andersen, Karin Nordström ; Petersen, D.H. ; Carlson, K. ; Molhave, K. ; Sardan, Ozlem ; Horsewell, A. ; Eichhorn, Volkmar ; Fatikow, Sergej ; Boggild, Peter

Author_Institution

MIC-Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby

Volume

8

Issue

1

fYear

2009

Firstpage

76

Lastpage

85

Abstract

Microgrippers that are able to manipulate nanoobjects reproducibly are key components in 3-D nanomanipulation systems. We present here a monolithic electrothermal microgripper prepared by silicon microfabrication, and demonstrate pick-and-place of an as-grown carbon nanotube from a 2-D array onto a transmission electron microscopy grid, as a first step toward a reliable and precise pick-and-place process for carbon nanotubes.

Keywords

carbon nanotubes; elemental semiconductors; grippers; microfabrication; micromanipulators; nanotube devices; silicon; transmission electron microscopy; 2-D array; 3-D nanomanipulation systems; Si; carbon nanotube; monolithic electrothermal silicon microgripper; nanotube manipulation; pick-place process; silicon microfabrication; transmission electron microscopy; Carbon nanotubes; microgrippers; nanomanipulation; pick-and-place;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2008.2006558

Filename

4636716