• DocumentCode
    875979
  • Title

    Holographic projection of microcircuit patterns

  • Author

    Foster, H. ; Hambleton, K.G.

  • Volume
    4
  • Issue
    3
  • fYear
    1968
  • Firstpage
    49
  • Lastpage
    50
  • Abstract
    The resolution of the real image formed by a hologram has been investigated experimentally with a view to overcoming the disadvantages of the present contact-print method of manufacturing microcircuits. A resolution of 4¿m over an area of 2.5 cm diameter has been obtained so far.
  • Keywords
    holography; microelectronics; production;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19680040
  • Filename
    4209987
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=875979