Title :
Holographic projection of microcircuit patterns
Author :
Foster, H. ; Hambleton, K.G.
Abstract :
The resolution of the real image formed by a hologram has been investigated experimentally with a view to overcoming the disadvantages of the present contact-print method of manufacturing microcircuits. A resolution of 4¿m over an area of 2.5 cm diameter has been obtained so far.
Keywords :
holography; microelectronics; production;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19680040
