Title :
Deposition of CuInSe2 films by a two-stage process utilizing E-beam evaporation
Author :
Basol, Bulent M. ; Kapur, Vijay K.
Author_Institution :
Inst. Solar Electr. Technol., Inglewood, CA, USA
fDate :
2/1/1990 12:00:00 AM
Abstract :
The deposition technique involves first depositing Cu and In metallic layers onto a substrate using the electron-beam evaporation method and then selenizing these layers in an H2Se atmosphere. High-quality CuInSe2 films of chalcopyrite phase have been obtained by this technique, and the films have been characterized by scanning electron microscopy, X-ray diffraction, electron microprobe, and resistivity measurements. Solar cells have been fabricated using these CuInSe2 films, and active-area conversion efficiency values approaching 11% have been demonstrated for these devices
Keywords :
X-ray diffraction examination of materials; copper compounds; electron beam deposition; photovoltaic cells; scanning electron microscope examination of materials; semiconductor growth; solar cells; ternary semiconductors; 11 percent; CuInSe2 films; E-beam evaporation; H2Se atmosphere; X-ray diffraction; chalcopyrite phase; conversion efficiency; electron microprobe; electron-beam evaporation method; polycrystalline CuInSe2; resistivity measurements; scanning electron microscopy; selenizing; solar cells; two-stage process; Atmosphere; Conductive films; Conductivity measurement; Electron devices; Helium; Photovoltaic cells; Semiconductor thin films; Sputtering; Substrates; Transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
