DocumentCode

880052

Title

Sensitivity of resist-coated silicon slices to argon-laser wavelengths

Author

Beesley, M.J.

Volume

5

Issue

12

fYear

1969

Firstpage

257

Lastpage

258

Keywords

integrated circuit production; thin films;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19690197

Filename

4210414