Title :
Measuring on-wafer high-frequency modulation response characteristics of optical transmitters and detectors
Author :
Debie, Peter ; Martens, Luc
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Belgium
fDate :
4/1/1996 12:00:00 AM
Abstract :
We present accurate techniques for measuring high-speed modulation response characteristics of optoelectronic transmitter and receiver devices. Because the devices we are considering in this paper are only available on wafers, microwave probing techniques have to be applied to establish electrical contact with the device. By doing so, the conventional DC-embedding techniques become too inaccurate to be used for this type of measurement. We present mathematical expressions for the different errors that exist in the measurement system, and they are used in the DC-embedding of the measured modulation response characteristics. Experimental results on several devices show the benefit of the presented measurement techniques
Keywords :
automatic test equipment; calibration; high-speed optical techniques; measurement errors; microwave measurement; optical modulation; optical receivers; optical transmitters; optoelectronic devices; semiconductor device testing; DC-embedding; LED; PIN photodetectors; avalanche photodetectors; computerised measurement system; error correction; high-speed modulation response characteristics; laser diode; microwave probing; network analyzer; on-wafer HF modulation response measurement; optical detectors; optical receivers; optical transmitters; optoelectronic devices; photodiode; response calibration; signal flow graph; systematic errors; Error correction; Microwave devices; Microwave measurements; Microwave theory and techniques; Optical detectors; Optical modulation; Optical receivers; Optical transmitters; Optoelectronic devices; Velocity measurement;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
