Title :
Experimental study of laser formed connections for LSI wafer personalization
Author :
Kuhn, Lawrence ; Schuster, Stanley E. ; Zory, Peter S., Jr. ; Lynch, George W. ; Parrish, James T.
fDate :
8/1/1975 12:00:00 AM
Abstract :
Experimental studies of connections formed in MOS-type structures by nanosecond dye laser pulses are described. Of particular importance are results relating to the reliability and reproducibility of the connection process. A model for the connection process is presented which correlates well with the various observations and experiments.
Keywords :
Integrated circuit production; Large scale integration; Laser beam applications; Monolithic integrated circuits; integrated circuit production; large scale integration; laser beam applications; monolithic integrated circuits; Aluminum; Conducting materials; Contact resistance; Large scale integration; Laser modes; Optical materials; Optical pulses; Programmable logic arrays; Reproducibility of results; Silicon;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1975.1050597
