Title :
Cleaning (electronics industry safety)
Abstract :
The problems posed by toxic materials used in electronics manufacturing are examined. The materials posing the greatest risks to workers and the environment are discussed. They are the ethylene glycol ethers used to thin the photoresist used in IC manufacture; fluorocarbons and trichloroethane, which destroy atmospheric ozone; and heavy metals. The search for alternatives is described.<>
Keywords :
electronics industry; health hazards; integrated circuit manufacture; personnel; safety; IC manufacture; electronics industry; environment; ethylene glycol ethers; fluorocarbons; health hazards; heavy metals; manufacturing; ozone; photoresists; safety; toxic materials; trichloroethane; Animals; Anti-freeze; Chemicals; Cleaning; Electronics industry; Lithography; Production; Resists; Safety; Silicon;
Journal_Title :
Spectrum, IEEE
