Benchmarking semiconductor manufacturing

Author

Leachman, Robert C. ; Hodges, David A.

Author_Institution

Coll. of Eng., California Univ., Berkeley, CA, USA

Volume

9

Issue

2

fYear

1996

fDate

5/1/1996 12:00:00 AM

Firstpage

158

Lastpage

169

Abstract

We are studying the manufacturing performance of semiconductor wafer fabrication plants in the US, Asia, and Europe. There are great similarities in production equipment, manufacturing processes, and products produced at these plants. Nevertheless, data reported here show that important quantitative measures of productivity vary by factors of 3 to as much as 5 across an international sample of 16 plants. We conducted on-site interviews with manufacturing personnel to better understand reasons for the observed wide variations in productivity. We have identified factors in the areas of information systems, organizational practices, process and technology improvements, and production control that correlate strongly with productivity

Keywords

VLSI; computer integrated manufacturing; human resource management; integrated circuit manufacture; manufacturing data processing; production control; production engineering computing; quality control; CIM; benchmarking; information systems; manufacturing performance; manufacturing processes; organizational practices; production control; production equipment; productivity; semiconductor manufacturing; semiconductor wafer fabrication plants; Asia; Europe; Fabrication; Information systems; Manufacturing processes; Personnel; Production control; Production equipment; Productivity; Semiconductor device manufacture;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.492810

Filename

492810