• DocumentCode
    880775
  • Title

    A production planning methodology for semiconductor manufacturing based on iterative simulation and linear programming calculations

  • Author

    Hung, Yi-Feng ; Leachman, Robert C.

  • Author_Institution
    Dept. of Ind. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • Volume
    9
  • Issue
    2
  • fYear
    1996
  • fDate
    5/1/1996 12:00:00 AM
  • Firstpage
    257
  • Lastpage
    269
  • Abstract
    We introduce a methodology for automated production planning of semiconductor manufacturing based on iterative linear programming (LP) optimization and discrete-event simulation calculations. The LP formulation incorporates epoch dependent parameters for flow times from lot release up to each operation on each manufacturing route. LP-derived release schedules are used as input to the simulation model, from which statistics on flow times are collected and used to reformulate the LP model for a revised planning calculation. Iteration continues until satisfactory agreement between simulation and LP models is obtained. We demonstrate in experiments on an industry data set that a relatively small number of iterations is required to develop a production plan correctly characterizing future flow times as a function of factory load and product mix. The methodology makes possible automated production planning of semiconductor manufacturing on an engineering work station
  • Keywords
    computer aided production planning; discrete event simulation; integrated circuit manufacture; iterative methods; linear programming; discrete-event simulation calculations; epoch dependent parameters; factory load; flow times; iterative simulation; linear programming calculations; lot release; planning calculation; product mix; production planning methodology; semiconductor manufacturing; Discrete event simulation; Iterative methods; Job shop scheduling; Linear programming; Manufacturing automation; Optimization methods; Production planning; Semiconductor device manufacture; Statistics; Virtual manufacturing;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/66.492820
  • Filename
    492820