DocumentCode
881988
Title
Charge-Sheet Model Fitting to Extract Radiation-Induced Oxide and Interface Charge
Author
Galloway, K.F. ; Wilson, C.L. ; Witte, L.C.
Author_Institution
Semiconductor Electronics Division National Bureau of Standards Gaithersburg, MD 20899 and Electrical Engineering Department University of Maryland College Park, MD 20741
Volume
32
Issue
6
fYear
1985
Firstpage
4461
Lastpage
4465
Abstract
A method for extracting values of oxide and interface charge from the current-voltage (I-V) characteristics of long-channel MOSFETs is described. The one-dimensional charge-sheet model developed by Brews provides the basis for the I-V characteristics. The I-V characteristics given by this model are optimized with respect to a set of experimental data for an irradiated devrice with the flatband voltage and the mobility the only free parameters. Simple relationships between these parameters and the radiation-induced interface and oxide charge are assumed.
Keywords
Annealing; Current measurement; Data mining; Degradation; Doping; Interface states; Ionizing radiation; MOSFETs; Semiconductor process modeling; Threshold voltage;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1985.4334142
Filename
4334142
Link To Document