Title :
Schottky I/sup 2/L (substrate fed logic) - An optimum form of I/sup 2/L
Author :
Walsh, Phillp S. ; Sumerling, Geoffrey W.
fDate :
4/1/1977 12:00:00 AM
Abstract :
A modified form of Schottky I/SUP 2/L (originally called substrate fed logic) has been developed, differing from the earlier process mainly in the extrinsic n-p-n base profile. Heavier boron doping in this region has led to reduced charge storage so that minimum delays as low as 8 ns/gate at a power of 50 /spl mu/W are now achieved in ring oscillator circuits. The reduced minimum delay also applies to more complex gates, as demonstrated by a D-type flip-flop which operated at 20 MHz with a power dissipation of 70 /spl mu/W/gate. The excellent yield and high packing density which have been obtained on trial circuits demonstrate that the process is capable of very large scale integration.
Keywords :
Bipolar integrated circuits; Flip-flops; Integrated logic circuits; Large scale integration; bipolar integrated circuits; flip-flops; integrated logic circuits; large scale integration; Capacitance; Delay; Doping profiles; Epitaxial layers; Fabrication; Schottky barriers; Schottky diodes; Substrates; Surface resistance; Tunneling;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1977.1050859