• DocumentCode
    883817
  • Title

    Depletion-isolation effect in vertical MOSFETs during the transition from partial to fully depleted operation

  • Author

    Hakim, M.M.A. ; de Groot, C.H. ; Gili, E. ; Uchino, T. ; Hall, S. ; Ashburn, P.

  • Author_Institution
    Microelectron. Group, Univ. of Southampton, UK
  • Volume
    53
  • Issue
    4
  • fYear
    2006
  • fDate
    4/1/2006 12:00:00 AM
  • Firstpage
    929
  • Lastpage
    932
  • Abstract
    A simulation study is made of floating-body effects (FBEs) in vertical MOSFETs due to depletion isolation as the pillar thickness is reduced from 200 to 10nm. For pillar thicknesses between 200-60nm, the output characteristics with and without impact ionization are identical at a low drain bias and then diverge at a high drain bias. The critical drain bias Vdc for which the increased drain-current is observed is found to decrease with a reduction in pillar thickness. This is explained by the onset of FBEs at progressively lower values of the drain bias due to the merging of the drain depletion regions at the bottom of the pillar (depletion isolation). For pillar thicknesses between 60-10nm, the output characteristics show the opposite behavior, namely, the critical drain bias increases with a reduction in pillar thickness. This is explained by a reduction in the severity of the FBEs due to the drain debiasing effect caused by the elevated body potential. Both depletion isolation and gate-gate coupling contribute to the drain-current for pillar thicknesses between 100-40nm.
  • Keywords
    MOSFET; circuit simulation; isolation technology; 10 to 200 nm; depletion isolation effect; drain-current; floating body effect; pillar thickness; vertical MOSFET; CMOS technology; FETs; FinFETs; Impact ionization; Isolation technology; Low voltage; MOSFETs; Merging; Silicon on insulator technology; Threshold voltage; Depletion isolation; fully depleted (FD); partially depleted (PD); vertical MOSFETs (VMOS);
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2006.871182
  • Filename
    1610933