DocumentCode :
885233
Title :
A frequency selective device utilizing the mechanical resonance of a silicon substrate
Author :
Wilfinger, R.J. ; Chhabra, D.S. ; Bardell, P.H.
Volume :
54
Issue :
11
fYear :
1966
Firstpage :
1589
Lastpage :
1591
Keywords :
Capacitive sensors; Information theory; Neck; Radar detection; Resonance; Resonant frequency; Signal processing; Silicon; Thermal expansion; Thermal stresses;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1966.5206
Filename :
1447136
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=885233
