DocumentCode
885233
Title
A frequency selective device utilizing the mechanical resonance of a silicon substrate
Author
Wilfinger, R.J. ; Chhabra, D.S. ; Bardell, P.H.
Volume
54
Issue
11
fYear
1966
Firstpage
1589
Lastpage
1591
Keywords
Capacitive sensors; Information theory; Neck; Radar detection; Resonance; Resonant frequency; Signal processing; Silicon; Thermal expansion; Thermal stresses;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1966.5206
Filename
1447136
Link To Document