DocumentCode :
885404
Title :
Hard targets
Author :
Collins, Luke
Volume :
5
Issue :
2
fYear :
2007
Firstpage :
28
Lastpage :
31
Abstract :
MEMS design means being able to tie the electrical world to the mechanical. One of the big problems with MEMS lies in design - finding the right people to do it and creating the tools and flows to make it, if not easy, then at least tractable. Another major issue for MEMS is encapsulation - packaging a part well enough that its moving or sensing elements do not get contaminated with water vapour or organic matter. This issue has been the rock on which a number of MEMS start-ups, particularly in the timing market, have already foundered
Keywords :
encapsulation; micromechanical devices; MEMS design; encapsulation; micromechanical devices; packaging;
fLanguage :
English
Journal_Title :
Electronics Systems and Software
Publisher :
iet
ISSN :
1479-8336
Type :
jour
Filename :
4212128
Link To Document :
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