Author :
Minagawa, S. ; Kondow, M.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
fDate :
3/6/1989 12:00:00 AM
Abstract :
Zinc-doping into
Keywords :
aluminium compounds; gallium compounds; indium compounds; semiconductor doping; semiconductor epitaxial layers; vapour phase epitaxial growth; zinc; atmospheric metalorganic vapour phase epitaxy; doping efficiency; hole concentration; saturation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19890284