DocumentCode
886278
Title
Correction algorithms in a laser scanning dimension measurement system
Author
Chang, K.-S. ; Lu, S.-T. ; Wu, Y.-P. ; Chou, C.
Author_Institution
Dept. of Appl. Phys., Chung Cheng Inst. of Technol., Taoyuan, Taiwan
Volume
139
Issue
2
fYear
1992
fDate
3/1/1992 12:00:00 AM
Firstpage
57
Lastpage
60
Abstract
The principal system error in a laser scanning dimension measurement system (LSDMS) is the variation of the scanning speed of the laser beam at different locations of the measuring region, which is caused mainly by the conventionally corrected lens. When a small spin gauge is positioned and measured within the measuring region of the LSDMS, the deviation of the scanning speed from a constant speed can be obtained. This deviation is the criterion on which two correction algorithms are based. The correction algorithms are proposed and discussed, and both show satisfactory improvement in the performance of the LSDMS.
Keywords
measurement by laser beam; spatial variables measurement; constant speed; correction algorithms; deviation; laser scanning dimension measurement; scanning speed; spatial variables measurement; spin gauge;
fLanguage
English
Journal_Title
Science, Measurement and Technology, IEE Proceedings A
Publisher
iet
ISSN
0960-7641
Type
jour
Filename
210686
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