• DocumentCode
    887236
  • Title

    A simplified self-aligned Al-gate MOS technology for high performance depletion-logic circuits

  • Author

    De Souza, Pereira J. ; Charry, E.

  • Volume
    14
  • Issue
    3
  • fYear
    1979
  • fDate
    6/1/1979 12:00:00 AM
  • Firstpage
    651
  • Lastpage
    653
  • Abstract
    A simplified fully ion-implanted Al-gate MOS technology for high performance self-aligned depletion load circuits is described. Using a 21 stage-ring oscillator, delay times and speed-power products of 1.1 ns and 1 pJ, respectively, were measured.
  • Keywords
    Field effect integrated circuits; Integrated circuit technology; Integrated logic circuits; field effect integrated circuits; integrated circuit technology; integrated logic circuits; Analog integrated circuits; Band pass filters; Delay; Etching; Integrated circuit technology; Ion implantation; Logic circuits; Plasma measurements; Resists; Solid state circuits;
  • fLanguage
    English
  • Journal_Title
    Solid-State Circuits, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9200
  • Type

    jour

  • DOI
    10.1109/JSSC.1979.1051232
  • Filename
    1051232