• DocumentCode
    887307
  • Title

    IEEE copyright form

  • Volume
    17
  • Issue
    1
  • fYear
    2004
  • Firstpage
    75
  • Lastpage
    76
  • Abstract
    Authors must enclose a signed copy of this form when submitting manuscripts to the Editor of this publication.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.824190
  • Filename
    1265771